Henchbots

If Henchbots leaves the battlefield before its triggered ability resolves, the target creature won't be exiled.

Auras attached to the exiled creature will be put into their owners' graveyards. Any Equipment will become unattached and remain on the battlefield. Any counters on the exiled creature will cease to exist. When the card returns to the battlefield, it will be a new object with no connection to the card that was exiled.

If a token is exiled this way, it will cease to exist and won't return to the battlefield.